Design and optimization of an integrated MEMS gas chamber with high transmissivity
نویسندگان
چکیده
منابع مشابه
Analysis and design optimization of an integrated micropump-micromixer operated for bio-MEMS applications
A generic microfluidic system composed by two single chamber valveless micropumps connected to a simple T-type channel intersection is examined numerically. The characteristics of a feasible valveless micropump have been used in the design, where efficient mixing is produced due to the pulsating flow generated by the micropumps. The advantages of using time pulsing inlet flows for enhancing mix...
متن کاملDesign of Novel High Sensitive MEMS Capacitive Fingerprint Sensor
In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the f...
متن کاملDesign and optimization of a 3-DOF planar MEMS Stage with integrated thermal position sensors
This work presents the design and optimization of a large stroke planar positioning stage in a single-mask MEMS fabrication process. Electrostatic comb-drive actuators were used to control the position and rotation of the 3-DOF stage. Thermal displacement sensors are integrated to provide feedback. Simulations show that we are able to reach a +/-120μm range of motion and +/-30 degrees of rotati...
متن کاملThe Design and Optimization of Distillation Column with Heat and Power Integrated Systems
Based on two integration steps, an optimization framework is proposed in this work for the synthesis and design of complex distillation sequence. The first step is to employ heat integration in sequence and reduce the heat consumption and total annual cost of the process. The second one is to increase the exergetic efficiency of sequence by generating power in implemented expanders in sequence....
متن کاملCAD for Integrated MEMS Design
The long term impact of MEMS technology will be in its ability to integrate novel sensing and actuation functionality on traditional computing and communication devices enabling the ubiquitous digital computer to interact with the world around it. The design of such integrated systems will occur at the system level, driven primarily by the application. Methodologies that ease the integration of...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Digital Communications and Networks
سال: 2021
ISSN: 2352-8648
DOI: 10.1016/j.dcan.2020.05.006